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Fundamentals of Microfabrication

New books on the table

Volume I: Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology Volume II: Manufacturing Techniques for Microfabrication and Nanotechnology Volume III: From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set
Vol I: Solid-State Physics, Fluidics, and Analytical Techniques in Micro-and Nanotechnology. Vol II: Manufacturing Techniques for Microfabrication and Nanotechnology  Vol III: From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications. Fundamentals of Microfabrication and Nanotechnology, 3rd Edition, Three-Volume Set.
Click to Order! Amazon.com
Oops! I made a mistake! UCI BIOMEMS GROUP Upcoming  Madou Talks! DIMPS
Book Errata UCI BIOMEMS TEAM Upcoming Madou Talks Desktop Integrated Manufacturing Platforms
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